VPTS Series Vacuum <br>Plasma Treatment System - Shanghai UV Electronic Manufacturing Equipment Co., Ltd

VPTS Series Vacuum
Plasma Treatment System

The vacuum plasma treatment system is designed for surface purification, activation, roughening, etching, and grafting. It can be used to treat various materials, including polymers, metals, and semiconductors.

Product Advantages

Human-machine interactive system
Suitable for complex 3D workpieces
Does not alter the inherent properties of the material; modification occurs only on the surface
Fully dry processing with no pollution
Low-temperature treatment, suitable for heat-sensitive materials
High stability and long service life
Low energy consumption and minimal maintenance costs

Product Parameters

Supply and demand

Power supply：380V/50Hz, three-phase, 15A

Process gas: Input pressure 0.2MPA

Compressed air: Input pressure 0.6MPA

Optional configuration

• RF generator
• Circulating water cooler

• Vacuum chamber size (customizable)
• MFC resistant to corrosive gases

• Vacuum pump

Product model/configuration	VPTS-80	VPTS-110
dimension	1050x1020x1750mm	1050x1020x1750mm
Vacuum chamber size	450x400x450 mm	530x520x400 mm
Effective size of bracket	400x320mm，6floor	480×330mm，8floor
Vacuum chamber material	Al-mg alloy
Vacuum pump	Dual oil pump
Mass flow controller	0-500 Sccm(Optional)
Vacuum gauge	ULVAC
Radio frequency power supply	13.56MHZ(Power optional)
Water cooling system	Water cooled electrode plate + Water cooler (optional)
PLC System brand	Siemens
Electrical system brand	Schneider
Touch screen	10.7
Treatment gas	O2 、Ar 、N2 、 CDA